Solid Precursor Delivery System Expert

Overview

The Solid Precursor Delivery System Expert is responsible for the design, optimization, operation, and troubleshooting of systems that store, handle, vaporize, and deliver solid chemical precursors for semiconductor manufacturing and related advanced material processes. This role requires deep technical expertise in precursor material properties, thermal management, fluid dynamics, and integration with Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), and other thin-film process tools.

Key Responsibilities

• System Design & Optimization
  • Design, specify, and implement solid precursor delivery systems including canisters, vaporizers, heaters, flow controllers, and transport lines.
  • Ensure compatibility with specific solid precursors (e.g., metal organics, halides, dopants) and their thermal/chemical requirements.
  • Optimize delivery systems for consistent precursor flow rates, minimal waste, and high reliability.
• Process Integration
  • Collaborate with process engineers to integrate solid precursor delivery systems into CVD, ALD, and other deposition tools.
  • Validate system performance in pilot and production environments, ensuring stable film properties and deposition rates.
• Material Handling & Safety
  • Establish protocols for safe handling, loading, and disposal of solid precursors, considering toxicity, reactivity, and environmental impact.
  • Ensure compliance with local, national, and international safety regulations and SEMI standards.
• Troubleshooting & Maintenance
  • Diagnose and resolve precursor delivery issues such as clogging, inconsistent vaporization, condensation, or flow instability.
  • Develop preventive maintenance schedules and troubleshooting guides for production technicians.
• Technology Development
  • Stay updated on new solid precursor chemistries and delivery technologies.
  • Drive continuous improvement initiatives to increase system uptime, reduce costs, and enhance process repeatability.
• Cross-Functional Collaboration
  • Work closely with chemical suppliers, equipment vendors, facilities engineers, and EH&S teams.
  • Provide technical training to operators and engineers on system operation and safety procedures.

Qualifications

Education:

• Bachelor’s degree in Chemical Engineering, Mechanical Engineering, Materials Science, or related discipline (Master’s or Ph.D. preferred).

Experience:

• 5+ years of experience in semiconductor process engineering, chemical delivery systems, or vacuum equipment design.
• Familiar with 5+ years of R&D experience in Solid precursor delivery systems or related components for Semiconductor Equipment industry, with in-depth knowledge of solid precursor delivery systems, pipelines, parts, and applications.
• Proven expertise in handling and delivering solid precursors (e.g., lithium tert-butoxide, hafnium chloride, trimethylaluminum solid forms, etc.).
• Experience with CVD/ALD equipment integration.

Skills & Knowledge:

• Strong understanding of thermodynamics, fluid dynamics, and heat transfer in precursor delivery.
• Knowledge of precursor sublimation/vaporization techniques and phase-change behavior.
• Familiarity with hazardous materials handling, gas cabinet systems, and purge/vent systems.
• Proficiency in CAD for system design and data analysis tools for process monitoring.

Preferred Qualifications

• Experience with multi-site global semiconductor manufacturing operations.
• Familiarity with SEMI S2/S8 safety guidelines and ISO cleanliness standards.